General Theory of Porous Functionally Gradient MEMS/NEMS Beam Resonators Subjected to Temperature Field

In this study, for the first time a generalized mathematical model MEMS/NEMS beam resonators subjected to temperature field made of a porous functionally graded material (PFGM) taking into account the elastic-plastic properties of the material and geometric nonlinearity was presented. An original computational method for the analysis of beam resonators has been developed. As examples, the results of a numerical analysis of beam resonators widely used in nanoelectromechanical systems are given.