Design and Characterization of a CMOS Electromagnetic Scanning Mirror for LiDAR Applications

This letter presents a dual-axis electromagnetically-driven piezoresistive sensed scanning mirror fabricated in a 0.35-
μ
m complementary metal–oxide semiconductor (CMOS) process. The fabricated structure is 60
μ
m thick and contains a 3-mm diameter mirror. The drive coil consists of two CMOS metal layers, and the piezoresistive sensors are implemented using n-well and polysilicon resistors for comparison. The measured optical angles for vertical and horizontal scans were 19.1° and 37.7° at 0.418 and 1.205 kHz, respectively. This design exhibited good drive efficiency with corresponding drive currents of 3.7 and 24.9 mA
_pp
, respectively.