Applying Hybrid Bonding Technique to Manufacture A Peristaltic Micropump With Extremely High Flow Rate

This paper significantly presents a novel fabrication process of a pneumatic peristaltic PDMS-PMMA micropump capable of generating an extremely high flow rate. Based on the excellent bond strength of the PDMS-PMMA, its assembly allows the micropump to operate at a high air pressure. The high air pressure enables sustaining the reciprocating displacement of the PDMS membrane at a high frequency to prevent a lagging effect of the diaphragm, thereby increasing the flow rate of the micropump. It was found that the maximum flow rate could be achieved 1600 μL/min at an air pressure of 300 kPa. A high-density configuration micropump system including three main microchannels was also manufactured to increase flow rate and demonstrate complex functions in microfluidic systems.