High-Q Resonator–Inductor Using LiNbO₃ Plate for Frequency Tuning in 1–5 GHz

In this article, a new high quality factor (
${Q}$
) inductor with piezoacoustic plate acoustic wave (PAW) resonators is presented. As indicated by the investigation of the acoustic wave propagation characteristics and transducer materials, the coupling coefficient (
${k}^{{2}}$
) of the shear-horizontal plate (SH
₀
) mode that propagates in the LiNbO
₃
plate increases to 55.7%, which leads to a wide inductive bandwidth of 29%. The longitudinal and transversal spurious modes are inhibited through novel edge reflector design and transducer engineering. The peak inductor quality factor (
${Q}_{L \text {,peak}}$
) of the acoustic resonator–inductor is obtained as 347, and a large range of inductance values are achieved to be up to 49 nH by regulating the interdigital transducer (IDT) number of fingers (NF). It is noteworthy that a larger inductance is realized in a more miniaturized device. Furthermore, the wavelength-scaling-induced physics is investigated for frequency tuning in 1–5 GHz, which reveals the multifrequency ability on a single chip of the SH
₀
acoustic resonator–inductor.