MEMS Switching Voltage Regulator Using a Normally-On Electret Relay

We report on a DC/DC step-down switching regulator using a microelectromechanical systems (MEMS) switch for the first time. The output voltage developed in a storage capacitor is used as a feedback control voltage for the electrostatic actuator that drives a micromechanical contact switch inserted between the rectifier and the capacitor. The switch is configured to be normally-on owing to the electrostatic potential remaining in the electret film on the electrodes. When the output voltage exceeds and the feedback control voltage cancels the built-in potential of the electret, the differential voltage acting on the actuator becomes small and the contact is opened, thereby decoupling the rectifier from the storage capacitor. When the output voltage becomes low, on the other hand, the net differential voltage becomes large and the contact is closed again, thereby reconnecting the rectifier to the capacitor and recovering the voltage. Fast repetition of this sequence maintains the DC voltage of the storage capacitor at a constant level. For demonstration, an electret film that is pre-charted to 240 V is used to regulate the output voltage in a range between 12 V and 14 V. Different from the switching regulators using transistors, the MEMS regulator does not require any bias current for operation, being suitable as a low-power voltage regulator for environmental energy harvesters. [2021-0220]