Three Axis Actuation of Moving Coil Type Electromagnetic MEMS Actuator for Optical Image Stabilization

In this paper, we report a moving coil type electromagnetic MEMS actuator with three-axis actuation which can be used in the application of optical image stabilizer (OIS). Compared with the conventional OIS actuators which are based on conventional machining and assembling technique, the actuator we developed is based on MEMS technique and can be used to actuate the CIS directly. The actuator has four driving units and one center moving stage. Connecting with driving units by parylene beams, the center moving stage is actuated by the application of current and outer magnetic field. The experimental results show that the in-plane displacement in X and Y and rotation in Z are nearly 50 µm and more than 2 degrees, respectively. Both the displacement and rotation angle can be improved by increase the current or magnetic field. The resonant frequencies of single direction displacement and rotation are 652 Hz and 780 Hz, respectively, which are sufficiently high for practical applications.