A Resonant High-Pressure Sensor Based on Six Cavities

This paper reports a resonant high-pressure sensor with a pressure range of 70 MPa based on six cavities. Compared to previous peer reports, the sensor utilized the dual-resonator-cavity design to minimize temperature disturbances and four-getter-cavity to improve the Q-factors of the resonators. The test results demonstrated that the higher Q-factors (>35000) and the lower differential temperature sensitivity of the sensor (with 0.4 Hz/°C). Benefiting from the characteristics of high Q-factors and low temperature sensitivities, the developed high-pressure sensor exhibited a higher accuracy of 0.02% FS within the pressure scale (0.11 to 6.5 MPa) and temperature scale (-10 to 60°C).