Recent Progress in MEMS Based Acoustic Vector Sensor for Underwater Applications

An acoustic vector sensor (AVS) is an underwater sound sensing device that converts acoustic energy into electrical energy. It can measure both the pressure and motion of a sound wave. However, for the determination of the direction of its source, an array of AVS devices is required which increases its size and cost. Miniaturization of such AVS devices for various practical and commercial applications is a newly developed research area due to advancements in Micro-Electro-Mechanical Systems (MEMS) technology. This paper presents a summary of recent progress in the development of MEMS-based AVS for sensing underwater sound. The fundamentals of AVS are briefly discussed. The design and fabrication of MEMS AVS is examined and various materials and types of structures used for its development are discussed. Various algorithms used for its operation are studied. MEMS AVS exhibit exceptional versatility and adaptability as miniaturized sensors for underwater operation and have advantages like low power consumption and excellent efficiency. The presented summary may be useful for many military and commercial applications.