Design and Implementation of OPC UA Server Based on SECS/GEM Protocol

In order to solve the problem of incompatibility of communication data between semiconductor manufacturing industry and other automation industries, a design scheme of OPC UA server development based on SEMI Equipment Communications Standard/Generic Model for Communications (SECS/GEM) was proposed. The design idea and workflow of the whole system are described in detail. After testing, the server has completed real-time communication with the third-party SECS/GEM equipment simulation software and UA client, and solved the problem that the data message in the communication process of semiconductor equipment is not compatible with OPC UA specification.