On the Design and Stability of a Reluctance Actuator for Precision Motion Systems

This paper proposes an optimization design algorithm for an E-core reluctance actuator considering the requirements of the precision motion system. Using the optimal design, the behavior of the reluctance actuator motion system is linearized by selecting the operating point at the linear region of the BH-curve. The proposed algorithm uses Grid search method and Pareto optimal approach. Through simulation results, the parameters of the proposed optimal design are considered within a precision motion system model that consists of motion stage dynamics and a flexure hinge mechanism model. The steady-state dynamic analysis is presented to determine the critical input current for the stable operation condition of the actuator with precision motion dynamics.