A T-Model With Parameter Extraction Method for Modeling 3-D Spiral Inductor

A new frequency-independent modified T-equivalent circuit for 3-D spiral inductor is proposed in this letter. Closed-form analytical expressions are proposed account for configuration and physics-based effect. Compared with double-
$\pi $
model, it uses less number of elements to capture the self-resonant frequency (SRF) information. Compared with the existing T-model, it can accurately reflect the characteristics that effect series resistance (ESR) increases of frequency at first and decreases at higher frequency. Verification with measurement data based on through glass vias (TGVs) process up to 20 GHz demonstrates excellent performance prediction.