Femtosecond Fabrication of 3D Free-Form Functional Glass Microdevices: Burst-Mode Ablation and Selective Etching Solutions

Femtosecond laser-based direct laser writing (FsDLW) is a constantly expanding area, with possible applications in a multitude of scientific and industrial fields [1] . One of the key advantages of FsDLW is the possibility to exploit nonlinear light-matter interactions and, thus, process transparent materials at micro- and nanoscale. Additionally, depending on the exact methodology used, a huge variety of different architectures can be achieved, including true 3D [2] . Therefore, there is a huge drive to push FsDLW towards more diverse and widespread applications.