Optical Coherence Microscopy for Integrated Photonics Devices Imaging

Optical coherence microscopy (OCM) is a method of three-dimensional visualization of micro-objects based on a combination of optical coherence tomography (OCT) and confocal microscopy [1] . OCM allows three-dimensional mapping of the refractive index of the sample and has a submicron resolution [2] . In addition, one of the methods, phase-sensitive OCM, has subnanometer axial sensitivity to changes in optical path-length [3] . The submicron resolution of the OCM makes it a powerful tool for studying semitransparent objects.