Flexible Film Loudspeaker Based on Piezoelectric PZT/Si Ultra-Thin MEMS Chips

This paper presents a novel film type of flexible loudspeaker by ultra-thin piezoelectric PZT/Si bare chip integrated on flexible film substrate. The device is designed to operate without a closed membrane offering significant improvements with respect to manufacturability. We have revealed that a fully audible sound pressure level of around 40 dB at 6500 Hz was generated for a film with an ultrathin PZT/Si chip 1 × 5 mm
²
in size. This technology is expected to be applied as electronic parts for surround or flexible parametric speakers for electronic paper and smartphones.