Novel Microchannel Profile Conrol of Micropowder Blasting Using Dynamic Viscoelastisity of Mask

New micropowder blasting system with controlling a mask temperature was proposed to realize a control of cross-sectional shape of the processing channel on a glass substrate. From an analysis of processing temperature dependence of dynamic viscoelastic properties of the commercial mask material for micropowder blasting, temperature control system which can be set to the micropowder blasting machine was designed. An erosion of the mask during micropowder blasting depends on the loss tangent in dynamic viscoelasticity, and showed maximum value at the mask temperature of 100°C. Moreover, we confirmed that changing the processing temperature can be control the processing line pattern profile on the glass with the mask, and a small width channel was realized the processing temperature of 109°C.