Modeling Process and Device Behavior of Josephson Junctions in Superconductor Electronics With TCAD

We report the development of a process/device simulation platform to model superconductor electronics. The process simulator leverages the back-end modeling capabilities of Florida object-oriented process/device/reliability simulator (FLOOXS) and builds on the existing models to simulate processes specific to Josephson junction (JJ) fabrication. The device simulator uses the process generated models and computes the normal-state electrical properties of a Nb/Al-AlO/Nb JJ. It is used to predict key operational figures of merit and how they vary with changes in process models. By integrating the process and device simulation tools, this research aims to offer an environment for the simulation of JJ circuits.