Uniform CoPt permanent magnetic film with high in-plane coercivity

Permanent magnetic CoPt films with different Pt component are fabricated by magnetron sputtering on W buffer layer at ambient temperature. The magnetic, composition, structural and surface properties of the films are systematically characterized. Ultra-low surface roughness R
_a
=0.311 nm and high in-plane coercivity H
_c
=2410 Oe are realized, which may exhibit promising application potential in the area of magnetic sensors.