Dynamic Thermal Characterization of MEMS Electrothermal Actuators in Air

Dynamic performance of microelectromechanical system (MEMS) electrothermal actuators is directly determined by thermal principle and thermal characteristics at microscale differed from macroscale. To study and deeply understand the heat transfer mechanism and dynamic behavior of the MEMS electrothermal actuators, dynamic thermal measurements of a U-shaped thermal actuator and its array are implemented in air by using an infrared thermal microscope system with high spatial resolution. Both the steady-state, transient and frequency response thermal measurements are thoroughly carried out for the actuators. The temperature distribution, heating and cooling performances, and frequency response at different waveform voltages are analyzed and discussed. Furthermore, the electro-thermo-structural coupling model is established and the simulated results are compared with the measured results including steady-state, transient and frequency response thermal performances. By qualitative and quantitative comparisons, the simulated results are in fairly good agreement with the measured results.