[Invited] Electrochemical Impedance Sensor for Non-invasive Living Cell Monitoring toward CMOS Cell Culture Monitoring Platform

A CMOS-based microelectrode impedance sensor array chip for label-free non-invasive cell culture monitoring platform is presented. Our fabricated CMOS sensor chip shows successful operation in obtaining impedance as a function of frequency, as well as a 2D impedance mapping image. Computer simulations of single cell impedance measurement by a microelectrode underneath the cell are also presented. Use of our impedance sensor platform and computer simulation method will enable automatic generation of an extensive amount of data set, leading to data-driven cell physiology research and assay.