Influence of the Different Design of Inertial Mass Suspensions on the Properties of a Microelectromechanical System(MEMS) Sensitive Element

There is a wide variety of designs of the suspensions used in capacitive micromechanical accelerometers and other MEMS. In this paper, the most common designs of silicon suspensions of the inertial mass of the sensitive element are investigated. The results of their modeling are presented. The results of modeling the most important parameters of the sensitive element using the ANSYS program are obtained and analyzed. Recommendations have been developed for the choice of the design of silicon suspension elements that provide increased stability of the parameters of the micromechanical accelerometer. The results obtained are in demand in the development of advanced designs for MMA and other MEMS products.