Development of a Micromechanical Accelerometer

The article describes the developed design of the sensing element of a micromechanical accelerometer, provides the results of modeling: modal analysis, analysis under the static effect of acceleration, calculated changes in the main parameters of the accelerometer when the temperature changes. The results of studies of the dependence of the value of the lateral undercut on the accuracy of the angular alignment of the mask with the crystallographic axis of the plate are presented.