Design of Force-to-Rebalanced System With Adaptive Fuzzy-PID Controller for N = 3 MEMS Disk Gyroscope

In this paper, an adaptive fuzzy-PID controller is proposed to make the closed-loop drive system of a MEMS disk gyroscope with a high Q respond faster without overshoot and achieve high stability accuracy. The principle of the MEMS disk gyroscope operating in force-to-rebalanced (FTR) mode is studied. An adaptive fuzzy-PID controller is designed and implemented. The fuzzy controller adjusts the parameters of the PID controller online according to the input error and error change rate. The response time of closed-loop drive of the gyroscope is reduced from 1.09 s to 0.54 s, and the overshoot is reduced from 20% to 0.004%, with no degradation in angle random walk (ARW) and bias instability (BI). The FTR control system is implemented on a field programmable gate array (FPGA) platform. The performance of the n=3 MEMS disk gyroscope with natural frequency of 9,536 Hz and a quality factor of ~20000 using the novel FTR control system revealed an ARW of 0.1667 deg/ √ hr and an in-run BI of 1.177 deg/hr.