An Antenna-Shaped MEMS Tactile Sensor with Angle Detection Capability

This is the first report of an antenna-shaped MEMS tactile sensor that integrates a detector for correcting the device's measuring posture in a single chip. Many objects are difficult to measure using conventional tactile sensors. For example, it has been difficult to measure objects with curved surfaces or holes because of the size and measurement method of the sensors. Our solution to these problems was inspired by the antenna characteristics of insects and enables us to measure complex and intricate areas in a small and narrow space. The antenna-shaped angle detection integrated in the tip of the device detects the relative state of the target and simultaneously acquires fine irregularities in micro areas for the first time.