Carbon nanotubes metasurface integrated with silicon microfluidic channel for THz sensor

A novel design for terahertz sensor based on carbon nanotubes (CNTs) metasurface and silicon metasurface integrated with microfluidic channel is proposed. Obvious enhanced resonant absorption peak observed are attributed to the coupling of the CNTs and silicon metasurfaces which excites the surface plasmon resonance. The peak absorbance is higher than 99% at the resonance frequencies with the higher quality factor (Q). The refractive index sensing capabilities of various solutions flowing into the sample cell through the microfluidic channel are also investigated. The results indicate that the proposed device can be used for sensing various materials with different refractive index.