Miniature wavefront correctors based on monolithic piezostack block

Stacked-actuator deformable mirrors (SADM) allow to compensate for wide range of wavefront distortions. They are distinguished for their large stroke of control elements, high operational speed, the possibility of correction for small-scale aberrations. The SADM with 6x6 actuators placed on the aperture 30x30 mm was developed. The thickness of mirror substrate was 1 mm. The maximal deformation stroke of the SADM was about 5 microns.