Commercial Production of Epitaxial PZT for Piezoelectric MEMS Applications

A commercially produced monocrystalline-like epitaxial PZT film is described for piezoelectric MEMS applications. Films with a thickness of
$1\ \mu \mathrm{m}$
to
$2\ \mu \mathrm{m}$
exhibit a typical transverse piezoelectric d31 coefficient of −185 pm/V, relative dielectric permittivity of 430 and dielectric loss of 0.015. These films are commercially available for piezoelectric MEMS device development and production.