Influence of target production techniques on target properties, sputtering process and thin films for magnetooptics

Different production techniques for the fabrication of rare-earth/transition-metal sputtering targets based on FeCoGdTb and target tests for the preparation of magnetooptical thin films have been investigated. Correlations between target production techniques and resulting target properties as well as some effects on the thin films and the sputtering process are described.<
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