Design of an Intelligent Control System for 2D Precision Stages

In order to improve the position measurement and remote collaborative capabilities of 2D precision stages, Direction identification based on moire fringe signal quadrupling and its matching circuit is studied to improve the positioning performance. The chip MAX7651 and AX88796 are used to design the Industrial Ethernet interface. Based on analysis of the electromechanical model for 2D precision stages, the variable speed PID algorithm is applied and the test results prove the effectiveness.