TaOx ReRAM as a Highly-Reliable Embedded Memory and Its Application to Edge Al

Panasonic’s ReRAM technology contributes to Smart Society by offering low-power edge-oriented devices. We have developed 40nm embedded ReRAM technology with TaOx-based memory cells. Using process and device technologies for CMOS-compatible 40nm ReRAM cells, highly reliable 8M-bit 40nm ReRAM array characteristics were obtained in a mass production line.