Research on Linear Active Disturbance Rejection Control of Linear Motor XY Motion Platform

Linear motors are widely used in semiconductor packaging equipment to achieve high-speed and high-acceleration linear motion as well as high positioning accuracy. The linear motor XY motion platform is an essential component of semiconductor packaging equipment and consequently, the improvement of its motion performance is of great significance to the packaging industry. The active disturbance rejection controller (ADRC) is the controller which not only inherits the advantages of traditional PID controller which decreases tracking errors based on tracking errors, but also can make system realize high response speed and small overshoot at the same time. The linear active disturbance rejection controller (LADRC) is a linear simplified ADRC with the characteristics of easier parameter tunning. In this paper, LADRC is proposed to be used in the linear motor XY motion platform servo system. System dynamics and disturbances are observed by the linear extended state observer (LESO) and compensated to improve interference rejection capability and stability of the servo system. Besides, the feedforward controller (FFC) is adopted to improve the response speed of the XY platform. A simulation model of the linear motor XY motion platform control system is established to verify the validity of LADRC. Disturbances are applied to the PID, LADRC and LADRC with FFC models respectively. Motion performances under these three situations are compared. The results show that compared with the PID control, linear active disturbance rejection control combined with feedforward compensation can improve the tracking performance and anti-interference ability of the system.