Observation of Low-Energy Electrons Transmission Through Periodic Arrays Micro-Pattern Silicon Window

This paper describe a new kind of electron transmission window (ETW) with periodic arrays micropattern and one-dimensional nanostructure, which is fabricated by microfabrication and chemical etching from a 500 ± 10μm-thick n-type Si wafer. The arrays field emission electrode (AFEE) is produced to emit well focused electrons, which is powered by nanosecond-pulse voltage (the absolute value ≤ 8.5KV). The ETW shows the transmission ability for low-energy electrons verified by transmission performance analysis and visualization diagnosis.