Time-Domain Analysis of a Novel Co-Resonant Cantilever MEMS Sensor and Derivation of a New Measurement Concept Based on Beating

Co-resonant coupling can be employed to significantly enhance the sensitivity of dynamic-mode cantilever MEMS sensors. In applications, the resonance frequency, amplitude or phase of the sensor is usually tracked. Here, we focus on the analysis of the time-domain behavior of the co-resonant system as that allows new insights into the highly dynamic behavior of the coupled system and the derivation of a new measurement approach based on beating. The modelling approach by numerical SPICE simulations as well as closed analytical solutions based on differential equations are presented. For validation, the results are compared to experimentally obtained sensor data. [2020-0076]