A novel electrothermal compliance microgripper

In this paper, a novel microgripper based on two perpendicular arrangements of beams and a chevron actuator is shown. In each perpendicular arrangement, the constrained displacement of the double clamped beams, joined at their endpoint, produces a buckling in each beam, which favors the displacement of each arm of the microgripper, normally open. These arrangements constitute the highly flexible structures of the microgripper. Their buckling is produced by the force applied by chevron arrow, producing a reaction force in the range of 174.44 μN in the microgripper jaws. Chevron actuator is fed by a thermal source. Temperature in microgripper tips is of 34.42°C and the operation frequency is 33.966 kHz, at maximum load thermal applied of 200°C. The mechanical, thermal and modal analyses of this integrated structure was supported by SIMSOLID
^TM
, based on Finite Element Analysis. The simulation was developed with Polysilicon as structural material.