Improvement of crystallinity and magnetic characteristics of ferromagnetic-Co/sub 77/Cr/sub 20/Ta/sub 3//paramagnetic-Co/sub 65/Cr/sub 35/ bilayered films

In order to improve the crystallographic and magnetic characteristics of Co-Cr-Ta recording layers, optimization of the substrate temperature T/sub s/ for the seed layers was investigated. Crystalline orientation and magnetic characteristics of the ferromagnetic-Co/sub 77/Cr/sub 20/Ta/sub 3/ layers were improved by adjusting T/sub s/ of the paramagnetic-Co/sub 65/Cr/sub 35/ seed layer in the range of 150-200/spl deg/C. It was found that deposition of the seed layer with excellent c-axis orientation is effective to enhance the perpendicular magnetic anisotropy and to prepare an ultrathin ferromagnetic recording layer. T/sub s/-optimized deposition of the seed layers will be useful for fabricating perpendicular magnetic recording media.