Deflection Analysis of Capacitive Micromachined Ultrasonic Transducer with InP Nanowires

In this paper, the clamped circular CMUT model developed using thin plate Kirchhoff’s theory is utilized for structural analysis. The CMUT with wurtzite indium-phosphide nanowires as membrane material has been analyzed, and results discussed for resonant frequency, capacitance variation, pull-in/collapse voltage along with deflection profile. This has been found that CMUT with indium phosphide membrane is suitable for air-borne applications.