Direct Fabrication of PEGDA Micro Suction Cup Array Using Inclined/Rotating Mirror Exposure System

This paper reports on direct fabrication method of a PEGDA micro suction cup array. A micro suction cup has been attracted in many application, however, conventional fabrication method using mold has limitation of the shape of the fabricated structure. The proposed fabrication method realizes a micro suction cup array with single exposure dose by inclined/rotating exposure system. As the suction cup material, UV curable Poly (ethylene glycol) diacrylate (PEGDA) is used due to its suitable characteristics. By controlling the inclined angle and mask pattern, the shape of micro suction cup can be designed. We conducted fabrication experiment of suction cup array of
$200\ \mu\mathrm{m}$
in diameter to confirm our proposed method is useful.