A <100 PPB/K Frequency-Matching Temperature Stability MEMS Rate Integrating Gyroscope Enabled by Donut-Mass Structure

This paper experimentally demonstrates a donut-mass gyroscope (DMG) with the highest frequency-matching temperature stability reported to date for a MEMS rate integrating gyroscope (RIG). The DMG features a donut-like rigid mass suspended on a single central anchor. The XY resonant frequencies share the same temperature-dependent mechanical elements and hence inherit high relative stability. Using a prototype, an angular gain of 0.993 is confirmed, after electrostatic tuning of frequency mismatch to △f = 80 mHz. Over the temperature range of 5-55 °C, △f and angular gain stay stable for <; 100 ppb/K and <; 100 ppm/K, respectively, without any temperature control or compensation. The angle drift is reduced to a seventh using variable resistor tuning.