Highly-Sensitive Indirect-Conversion X-Ray Detector With an Embedded Photodiode Formed by a Three-Dimensional Dual-Gate Thin-Film Transistor

This article reports on a highly-sensitive indirect-conversion X-ray detector with an embedded photodiode formed by a scintillator-coupled 3-D photosensitive thin-film transistor. A high X-ray sensitivity up to 2.5 × 10
⁵
μC·Gy
^-1
·cm
^-2
at a dose of 1 mGy is achieved due to full photon utilization and a high photo gain of ~10
⁴
by operating it in an active pixel sensor format. These performance characteristics make it a great promise for low-dose and high-spatial resolution large-area indirect-conversion X-ray detection.