Reliable and Accurate MEMS-based Thermal Conductivity Characterization Device for Individual Nanowires

Precision measurement of thermal conductivity at nanoscale can facilitate the study of the pursuing thermoelectric conversion efficiency. In this work, a new reliable and accurate MEMS-based device for thermal conductivity measurement of individual nanowires was developed. Overcoming the difficulties in measuring small temperature rise at nanoscale, the measurement error of temperature rise for nanomaterials was less than 0.1360%. Besides, the effect of substrate conduction, air heat conduction and radiation heat loss on testing of thermal conductivity was basically ruled out. The thermal conductivity of VO
₂
(M) single crystal nanowire with diameter of 294 nm was measured to verify the reliability and accuracy of the device.