Performance improvement of black silicon solar cells by a new passivation scheme

It is well known that, in crystalline silicon solar cells, the surface treatments are very important and have a great relevance in the final efficiency of the devices. Black silicon solar cells are the terminology commonly used for the crystalline silicon solar cells with different grades of surface texturizations. In this work, we prepared silicon solar cells with diverse grade of chemical surface treatment (alkaline etch and MACE treatment), plasma annealing (ammonia) with silicon-rich silicon nitride as passivation and antireflection coating. Spectral response, surface reflectance and short circuit current were measured to obtain the final performance of the cell fabricated in the present work.