High-Performance MEMS Pressure Sensor Fully-Integrated with a 3-Axis Accelerometer

The originality of the MEMS pressure sensor presented in this paper is due to the adjunction of a lever arm to sense the deformation of the diaphragm by suspended piezoresistive nanogauges. This transduction scheme can be easily transposed onto others inertial MEMS, and the paper illustrates this capability by the cointegration of a 10bar MEMS pressure sensor with a 3-axis MEMS accelerometers. The fabricated pressure transducer demonstrates high performances: the sensitivity is 6mV/V/bar and the pressure accuracy is estimated lower than 0,15% full scale for -35°C/+145°C temperature range.