High Sensitivity Near-infrared Sensors Based on Gold Nanorods Modified Aluminum Nitride Resonator

Herein, we propose an uncooled near-infrared (NIR) sensor based on acoustic wave resonator with an AlN layer grown on top electrode, we find it has a higher response to infrared. In addition, the specificity and sensitivity of the sensor have been greatly improved by modifying the surface of the resonator with a layer of gold nanorods (GNRs) which have the specific absorption of the near-infrared. As the results demonstrated, the detection sensitivity of modified sensors response to the halogen light source and 785 nm laser source are 1083.3 KHz/(mW/mm
²
) and 4489.8 KHz/(mW/mm
²
), respectively, which is 13 times stronger than reference sensor.