I. Introduction
With the rapid development of science and technology, the miniaturization of microwave and integrated circuit is an inevitable trend, resulting in small distributed spaces between components of circuits [1]. Meanwhile, due to small space and high operation frequency, electromagnetic interference (EMI) has become more and more obvious, which influences the normal operation of circuit [2]. Noise sources recognition or sources of electromagnetic interference is an effective method for designing circuits. The near field of device-under-test (DUT) measurement can be sensed by using a near field probe to achieve near field surface scanning [3]. Therefore, the probe is an important part of near field scanning.