Conductor-backed coplanar waveguide on BCB with thin metal layers and via holes

A process for microelectronic technology is developed for integration of passive devices with existing active device technology for submillimeter wave and THz frequency range applications. Performances of a conductor-backed coplanar waveguide on BCB polymer and interconnecting via between ground planes are presented up to 67 GHz with a 50 Ω characteristic impedance and a BCB relative permittivity of 2.676.