A Novel Wide-Band Finger-Shaped Phase Shifter on Silicon-On-Glass (SOG) Technology for Sub-Millimeter Wave and Terahertz Applications

This paper presents a novel approach to realize a low-cost and wide-band phase shifter structure operating over 150-190 GHz range of frequencies. The proposed finger-shaped phase shifter is implemented based on a newly developed integrated Silicon-On-Glass (SOG) technology. The phase shifting mechanism is achieved by moving a finger-shaped High Conductivity Silicon (HCS) section over the High Resistivity Silicon (HRS) waveguide, using a micro-positioner. Perturbing the silicon waveguide field causes phase shift. The experimental results indicates the proposed SOG finger-shaped phase shifter provides the averages of 15.6 degree/wavelength phase shift and 1.38 dB/wavelength added loss, respectively, over 150-190 GHz range of frequencies.