Study of Terahertz High Q-factor All-Dielectric Metamaterials

The propagation properties of Si based all-dielectric metamaterials (ADMs) structure have been investigated systematically in the THz regime. The results manifested that ADMs indicated sharp resonant curves with large factors of more than 60, and figure of merit was about 20. Compared with that of metal metamaterials counterparts, the thickness of ADMs (in the range of tens of micrometers) was much larger to excite obvious resonant curves. With the help of a uniform graphene layer, the resonant curves can also be flexible modulated in a wide range, the amplitude modulation depth can reach about 40%. The results are very useful to design high Q factor dielectric devices in the future, e.g. biosensors, modulators, and filter.