Mems Micro-Pump for Air Sampling Application

This paper presents a MEMS air micro-pump. The innovative aspect of this work includes the demonstration of a single device that can pump air under two different operation modes. In the first mode the device operates based on the principle of an acoustic standing wave. In the second, its operation is based on the mechanical displacement mode. The measured air flow-rate depends on the operation mode and the driving voltage and extends to 2 and 8 mL/min for the acoustic standing wave and displacement mode, respectively.