Design and Simulation of a Si3N4 Sub-GHz Resolution Integrated Micro-Spectrometer

Silicon Nitride (Si
₃
N
₄
) based photonics circuits fabricated using TriPleX technology have proven to be low-loss while occupying relatively small footprint. We designed and simulated an Arrayed Waveguide Grating (AWG) with 50 GHz channel spacing over 5 nm wavelength range in the C-band together with a Micro Ring Resonator (MRR) with an FSR of 50 GHz as integrated building blocks of a micro-spectrometer using Si
₃
N
₄
waveguides. Simulation results reveal 2 - 4 dB loss for AWG and sub-GHz resolution for MRR.