Potassium Tartrate as a Complexing Agent for Cobalt “Buff Step” CMP in Alkaline Slurry

This paper investigates the dynamic corrosion potential differences of cobalt and titanium at different pH values and hydrogen peroxide concentrations. The effects of oxidants like hydrogen peroxide, complexing agents like Potassium tartrate (PTH) on the polishing rate of cobalt and titanium were studied. The lower galvanic corrosion potential differences were obtained, and the better polishing removal ratio was achieved.