High-Responsivity MSM Solar-Blind UV Photodetector Based on Annealed ITO/Ag/ITO Structure Using RF Sputtering

In this paper, a novel ITO/Ag/ITO (IAI) multilayer UV photodetector was successfully prepared via RF magnetron sputtering technique to achieve the dual-benefit of improved photoresponse and outstanding visible blindness properties. The influence of the annealing process on the performance of the elaborated IAI UV photodetector was carried out. Moreover, the structural and photoelectrical properties of the sputtered tri-layered structures with and without annealing effects were also analyzed. It was found that the elaborated UV -photodetector provides near perfect UV absorbance of 96%. This achievement is attributed to the improved light trapping capability and tunable plasmonic resonance effects induced by the efficient optical coupling between free-space UV photons and Ag plasmons. It was also revealed that the heat treatment paves a new path toward preparing efficient visible-blind UV photodetectors, where the annealed sample demonstrated a superior rejection ratio of 225 as compared to that of the unannealed counterpart. Besides, electrical characterization underlined the ability of the annealed IAI UV photodetector at 500°C for offering exciting opportunities, where it exhibits a high responsivity of 3.8mA/W at self-powered condition. Therefore, by well optimizing both IAI multilayer geometry and annealing conditions, we were able to elaborate an ultrathin photodetector suitable for high-performance and flexible UV sensing applications.